Billerica advanced manufacturing expansion
Entegris Inc., Billerica, Middlesex County, Massachusetts
Billerica advanced manufacturing expansion in Billerica, Massachusetts is Entegris Inc.’s plant for semiconductor materials and process products. Status: announced as of September 17, 2025. Entegris Inc. announced $100 million and 200 jobs. Primary source: mass.gov, checked November 12, 2026.
- Status
- Announced
- Announced investment
- $100 million
- Announced jobs
- 200
- Industry
- Semiconductors
- Sheet
- MA-03
- Revised
- November 12, 2026
Status timeline
- Announcedmass.gov
Filled dots are confirmed by a company, state, SEC or federal source. Dashed dots come from news reports only. Investment and job figures are as announced, not achieved.
Plant facts
| Company | Entegris Inc. |
|---|---|
| Plant | Billerica advanced manufacturing expansion |
| Location | Billerica, Middlesex County, Massachusetts |
| Industry | Semiconductors |
| Product | Semiconductor materials and process products |
| Announced investment | $100 million |
| Announced jobs | 200 |
| Last checked | November 12, 2026 |
Sources
- Mass.gov: EACC awards $25.5 million in tax credits (September 2025) (state release, mass.gov, checked November 12, 2026)
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